Another SiC National Standard drafted by Tankeblue has been issued successfully
SiC National Standard drafted by Tankeblue and Institute of Physics, Chinese Academy of Science has been issued successfully. This standard was issued on Dec 10, 2015 and will be carried out on Jan 1, 2017.
“Test method for flatness of monocrystalline silicon carbide wafers”, GB/T 32278-2015, prescribes the test method for flatness of monocrystalline SiC wafers, including TTV, LTV, Bow and Warp. This standard is suitable for flatness test of monocrystalline SiC wafers when the diameter of SiC wafer is 50.8 mm or 76.2 mm or 100 mm and its thickness is between 0.13 mm to 1 mm.
This standard provides research institutions and upstream and downstream enterprises in SiC industry with one normal test method and evaluation system. It possesses the same advanced level with the similar international standard and gives support in the product quality, which will accelerate the healthy development of SiC industry in China and improves its international influence.This standard proposes test method for flatness of monocrystalline SiC wafers for the first time in China and can meet different applications of monocrystalline SiC wafers. In addition, it is one of advanced material standards in “important technology standard field and key standard direction developed by beijing”, so the publish of this standard is beneficial not to form the superiority in SiC industry but to occupy the commanding height for beijing.